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Title:
DEVICE FOR INSPECTING CIRCUIT BOARD
Document Type and Number:
Japanese Patent JP2002014134
Kind Code:
A
Abstract:

To enhance reliability in inspection by measurement of electrostatic capacity.

This circuit board inspecting device 1, where contact type probes 3, 4 are provided to make contact with the conductor patterns of a circuit board P, where the probes 3, 4 are brought into contact with the conductor patterns insulated each other for measuring the electrostatic capacity between the each conductor pattern and a reference electrode 2b, and where the quality of the conductor pattern is inspected, based on the measured electrostatic capacity is provided with a measuring part 6 for supplying an alternating signal for the inspection between the probes 3, 4 under the condition that they are brought into contact respectively with the respective conductor patterns, and for measuring, under this condition, a measuring parameter, specified based on at least one out of a current value of a current flowing between the probes 3, 4, the voltage value of the alternating signal, and the phase difference between a voltage phase of the signal and a current phase thereof, and a determining part 8 for comparing the parameter with a reference value, to determine the contact condition of the probes 3, 4 to the conductor patterns.


Inventors:
SATO YOSHINORI
Application Number:
JP2000197430A
Publication Date:
January 18, 2002
Filing Date:
June 30, 2000
Export Citation:
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Assignee:
HIOKI ELECTRIC WORKS
International Classes:
G01R31/02; G01R31/28; H05K3/00; G01R1/06; (IPC1-7): G01R31/02; G01R1/06; G01R31/28; H05K3/00
Domestic Patent References:
JPS6117678U1986-02-01
JPH04221780A1992-08-12
JPH1144722A1999-02-16
JPH11142449A1999-05-28
JPH11142451A1999-05-28
JP2001242211A2001-09-07
JPS59168375A1984-09-22
JPH1123636A1999-01-29
JPH04501763A1992-03-26
JPH07280868A1995-10-27
JPH0587858A1993-04-06
JPH0682509A1994-03-22
Attorney, Agent or Firm:
Shinji Sakai