To provide the device for inspecting a substrate which enables sure prevention of the occurrence of poor contact, by securing the contact pressure between the electrode on the substrate and the contact probe.

The device for inspecting substrate 1 is equipped with a contact probe 54 contacted and conducted to the electrode of a substrate W, an inspection measurement circuit 55 to measure the electrical characteristics of the substrate W via this contact probe 54, a pin board 56 to set up the contact probe 54, and the drive mechanisms 57, 58 to actuate this pin board 56, in order to contact the contact probes 54 to the electrode. In addition, it is also provided with pins 2, arranged on the pin board 56 which are for the contact state detection to the electrode, the contact detector 3 to detect the quality of the contact state between these pins 2 used for the contact state detection and the electrode, and the position control circuit 4 to actuate drive mechanisms 57, 58 at imperfect contact so as to correct the position of the pin board 56.