Title:
DEVICE FOR LIQUID-PHASE EPITAXIAL GROWTH
Document Type and Number:
Japanese Patent JPH05330979
Kind Code:
A
Abstract:
PURPOSE:To provide a device for liquid-phase epitaxial growth capable of simultaneously growing single crystal films on plural substrate bases and uniformizing thickness of grown single crystal films. CONSTITUTION:Plural sheets of substrate bases 14 are supported vertically at intervals on a horizontal holding bar 15 whose one end is connected to a motor 17. The motor 17 is vertica1ly moved by a lifter 19. When holding bar 15 is dropped, the lower half of the substrate bases 14 is immersed in a raw material solution 13 in a crucible 12, the motor 17 is driven at this position to grow single crystal films on the substrate bases 14.
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Inventors:
FUJINO MASARU
MIZUNO TSUGUNOBU
AOTA MITSUHIRO
KUMATORIYA MASATO
SEKIJIMA TAKENORI
TAKAGI HIROSHI
MIZUNO TSUGUNOBU
AOTA MITSUHIRO
KUMATORIYA MASATO
SEKIJIMA TAKENORI
TAKAGI HIROSHI
Application Number:
JP16348492A
Publication Date:
December 14, 1993
Filing Date:
May 29, 1992
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
C30B19/06; C30B29/28; G02F1/09; H01L21/208; (IPC1-7): C30B19/06; C30B29/28; H01L21/208
Attorney, Agent or Firm:
Hidetaka Tsutsui