Title:
DEVICE FOR LIQUID PHASE EPITAXY
Document Type and Number:
Japanese Patent JPH04149094
Kind Code:
A
Abstract:
PURPOSE:To improve the yield and reliability of the semiconductor elements formed on substrates by combining a boat body, a boat slider, rails and a substrate holder boat so as to make specific actions. CONSTITUTION:Semiconductor raw materials are melted as melts 11, 12, 13 in through-holes 8, 9, 10 of the boat slider 1. The substrate holder boat 3 existing heretofore in a low-temp. region is then horizontally moved along the quartz rails 4, 4 by a quartz push rod 6 and is brought into contact with the boat body 2 existing in a high-temp. region. The front surface 3a of the substrate holder boat 3 attains the state smooth with the front surface 2a of the boat body 2 in this way. The boat slider 1 is then slid from the front surface 2a of the boat body 2 to the front surface of the substrate holder boat 3. Since the front surface 2a and the front surface 3a are smoothly connected, the sliding of the boat slider 1 without losing the melts 11, 12, 13 in the through-holes 8, 9, 10 is possible. The melts 11, 12, 13 in the through-holes 8, 9, 10 and the substrate 5 in the substrate receiving part 7 of the substrate holder boat 3 are brought into contact with each other to effect epitaxial growth one after another on the substrate 5.
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Inventors:
TERAOKA YOSHICHIKA
Application Number:
JP27480290A
Publication Date:
May 22, 1992
Filing Date:
October 11, 1990
Export Citation:
Assignee:
SHARP KK
International Classes:
C30B19/06; H01L21/208; (IPC1-7): C30B19/06; H01L21/208
Domestic Patent References:
| JPH01133994A | 1989-05-26 | |||
| JPS6230693A | 1987-02-09 |
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)