To provide a device for manufacturing a ceramic element, allowing polishing in such a manner as to locate an embedded body at a center axis in the radial direction of a ceramic sintered body.
The device for manufacturing the ceramic element comprises an X-ray detection part 31, a rotation control part 32, and a X-ray transmissive image processing part 33. A cross-cut of a heating element 42 on a cross-section image is found from a contour of the heating element 22 of a X-ray transmissive image and an axis of rotation of a pre-polished ceramic heater 20, when polished, can be found by calculating a position passing through its center. After the pre-polished ceramic heater 20 is roughly polished so that the obtained axis of rotation is at the center, it is polished and finished with centerless polishing work to obtain an intended ceramic heater 2. The heating element embedded in the ceramic sintered body can be located at the center in the radial direction with high precision, without the need for conventional severe management of the heating element, when embedded in the ceramic sintered body.
SUZUKI HIROYUKI
YOSHIKAWA TAKAYA
ITO MASAYA
| JPH11285955A | 1999-10-19 | |||
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