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Patent Searching and Data


Title:
DEVICE FOR MANUFACTURING SUBSTRATE
Document Type and Number:
Japanese Patent JP2006076848
Kind Code:
A
Abstract:

To prevent falling of a base material being vacuum-adsorbed while maintaining easy exchangeability of the base material without causing increase in the number of components.

The device for manufacturing a substrate is provided with a base material 52 having a projected part 52b on a surface opposing to a dipping surface 52a, a base material receiving stage 50 in which one end of each suction hole 81 is opened in the surface engaging with the projected part 52b, and a vacuum adsorption mechanism 8 for vacuum-adsorbing the projected part 52b to the base material receiving stage 50 by exhausting a gas in the suction holes 81. The base material 52 is vacuum-adsorbed to the base material receiving stage 50 in such a state that the projected part 52b is engaged with a dovetail groove 50a of the base material receiving stage 50.


Inventors:
TADERA TAKAMITSU
Application Number:
JP2004264075A
Publication Date:
March 23, 2006
Filing Date:
September 10, 2004
Export Citation:
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Assignee:
SHARP KK
International Classes:
C30B15/32; B22D23/04; C01B33/02; C30B29/06
Attorney, Agent or Firm:
Hisao Komori
Toshio Ozawa