Title:
DEVICE FOR MANUFACTURING VAPOR DEPOSITION MASK AND METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK
Document Type and Number:
Japanese Patent JP2022107470
Kind Code:
A
Abstract:
To provide a device for manufacturing a vapor deposition mask and a method for manufacturing a vapor deposition mask which achieve reduced defects.SOLUTION: This device for manufacturing a vapor deposition mask has a support base material having a first surface for supporting a to-be-plated member, a first support member and a second support member provided so as to surround the outer periphery of the to-be-plated member on the first surface, and an electrode part provided so as to be set apart from the first surface by a prescribed height. The first support member has a first wall part provided on the first surface, and a first eave part projecting toward the inside of the first surface at the upper section of the first wall part. The second support member has a second wall part provided on the first surface, and a second eave part projecting toward the inside of the first surface at the upper section of the second wall part. The first wall part has a first portion in which the height decreases to a prescribed height from the first surface, and a first step part formed on the inner face of the first wall part due to the first portion. The second wall part has a second step part formed by the electrode part projecting from the inner face of the second wall part by a prescribed height from the first surface.SELECTED DRAWING: Figure 9
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Inventors:
KIMURA RYOTARO
Application Number:
JP2021002444A
Publication Date:
July 21, 2022
Filing Date:
January 08, 2021
Export Citation:
Assignee:
JAPAN DISPLAY INC
International Classes:
C23C14/04; C25D1/10
Attorney, Agent or Firm:
Takahashi Hayashi & Partners