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Title:
DEVICE FOR MEASURING DEGREE OF VACUUM
Document Type and Number:
Japanese Patent JPH10239199
Kind Code:
A
Abstract:

To accurately measure the degree of vacuum without withdrawing outside a lead wire and the like, by calculating the degree of vacuum by a calculation means that is buried into a measurement object and generating a vibration corresponding to the degree of vacuum being calculated.

A vacuum meter 29 is buried into urethane 27 that is a core material inside a vacuum panel 21 but a signal line is not led out of the panel 21. Therefore, the sealing conditions of films 28a and 28b of the panel 21 where the vacuum meter is buried and a vacuum panel where it is not buried are equal. A mechanical vibration is transmitted from a vibration detection sensor 22 to a signal-processing circuit 23 as a voltage signal Vf, where the inner degree of vacuum of the panel 21 is measured from the signal Vf. The sensor 22 converts the mechanical vibration of a frequency fp to a sine wave voltage signal Vf, which is outputted to the circuit 23. The circuit 23 calculates the frequency fp of the sine wave signal Vf outputted from the sensor 22 and calculates the degree of vacuum from the relationship between the frequency fp and the degree of vacuum.


Inventors:
HAYASHI MASAKAZU
Application Number:
JP4549697A
Publication Date:
September 11, 1998
Filing Date:
February 28, 1997
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G01L11/00; G01L11/04; G01L21/22; (IPC1-7): G01L21/22; G01L11/04
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)