Title:
DEVICE FOR MEASURING POWER DENSITY DISTRIBUTION OF RADIATION SOURCE
Document Type and Number:
Japanese Patent JP2016138743
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a device for measuring power density distribution of a high power radiation source.SOLUTION: A device 1 for measuring power density distribution of a radiation source includes: a radiation source designed to radiate a light beam L in a radiation direction SR; a substrate 2 that is disposed downstream of the radiation source in the radiation direction SR, extends in an x-direction and a y-direction, has a first region 3 and at least one further second region 4, and includes a diffraction structure designed so that the first region 3 separates the light beam L hitting the substrate 2 into zero-order diffraction and at least one first-order diffraction; and a detection unit 8 that is disposed downstream of the substrate 2 in the radiation direction SR, and is designed to measure intensity of the first-order diffraction transmitting the substrate 2 and to derive power density distribution therefrom.SELECTED DRAWING: Figure 1
Inventors:
TOBIAS GNAUSCH
MEIK PANITZ
MUELLER RALF
MARC HIMEL
MEIK PANITZ
MUELLER RALF
MARC HIMEL
Application Number:
JP2014171653A
Publication Date:
August 04, 2016
Filing Date:
August 26, 2014
Export Citation:
Assignee:
JENOPTIK OPTICAL SYS GMBH
International Classes:
G01J1/02; G11B7/22
Domestic Patent References:
| JP2005081715A | 2005-03-31 | |||
| JPH04118529A | 1992-04-20 | |||
| JP2004233251A | 2004-08-19 | |||
| JPS645185U | 1989-01-12 | |||
| JPH07251277A | 1995-10-03 | |||
| JPH06209137A | 1994-07-26 |
Foreign References:
| US20120032065A1 | 2012-02-09 | |||
| US7420146B1 | 2008-09-02 |
Attorney, Agent or Firm:
Toru Tanabe