Title:
DEVICE AND METHOD FOR CLEANING
Document Type and Number:
Japanese Patent JP3253229
Kind Code:
B
Abstract:
PURPOSE: To provide a device and method for cleaning by which cleaning operation can be carried out with high accuracy in accordance with a cleaning schedule.
CONSTITUTION: A cleaning device is provided with a cleaning section 2 incorporated with a plurality of cleaning units, loader 3 which sets an object to be cleaned to a waiting state before the object is carried in the cleaning section 2, carrying mechanisms 11, 12, and 13 which carry the object between the loader 3 and section 2 and between each cleaning unit. At the time of cleaning the object, each cleaning unit and carrying mechanism are controlled in accordance with a preset cleaning schedule and whether or not the processing time zone of any one of the cleaning units and carrying mechanisms for the next object overlaps that of the same cleaning unit or carrying mechanism for the currently cleaned object is recognized. The object to be cleaned is carried in the cleaning section 2 when it is confirmed that the processing time zone of any one of the cleaning units and carrying mechanisms for the next object does not overlap that of the cleaning unit or carrying mechanism for the currently cleaned object.
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Inventors:
Miyata, Akira
Application Number:
JP1995000033558
Publication Date:
November 22, 2001
Filing Date:
February 22, 1995
Export Citation:
Assignee:
TOKYO ELECTRON LTD
TOKYO ELECTRON KYUSHU KK
TOKYO ELECTRON KYUSHU KK
International Classes:
B08B3/04; H01L21/02; H01L21/304; H01L21/677; H01L21/68; B08B3/04; H01L21/02; H01L21/67; (IPC1-7): H01L21/304; B08B3/04
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