Title:
DEVICE AND METHOD FOR DETECTING FLOW RATE
Document Type and Number:
Japanese Patent JP3065862
Kind Code:
B2
Abstract:
PURPOSE: To provide a high-performance flow rate detector using a thin film of diamond.
CONSTITUTION: A thermistor layer 12 is formed on a thin film 13 of diamond from platinum or the like and the quantity of heat taken away by a fluid 16 from the thin film 13 of diamond is detected as a change in the temperature of the thermistor layer 12. In particular the back side of the thin film 13 of diamond is contacted with the fluid 16 to prevent the fluid from corroding the material from which a thermistor or the like is made. A plurality of thermistor portions detect a thermal gradient created in the thin film of diamond, and the rate of flow, direction, and change of rate of flow of the fluid are measured from the condition of the thermal gradient.
Inventors:
Takashi Inujima
Limantus by tokus
Limantus by tokus
Application Number:
JP29126793A
Publication Date:
July 17, 2000
Filing Date:
October 26, 1993
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
G01F1/00; G01F1/68; G01F1/688; G01F1/692; G01P5/12; G01P13/00; (IPC1-7): G01F1/68
Domestic Patent References:
| JP63252224A |
Other References:
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