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Title:
DEVICE AND METHOD FOR EXPOSING CHARGED CORPUSCULAR BEAM, DETERMINING METHOD FOR EXPOSURE CORRECTION DATA AND METHOD FOR PRODUCING DEVICE BY APPLYING THE SAME METHOD
Document Type and Number:
Japanese Patent JP2001168018
Kind Code:
A
Abstract:

To expose a pattern on an object to be exposed by controlling the irradiation light of charged corpuscular beams on the basis of suitably selected correction exposure information and calibration information for correcting the dispersion of irradiation light mutually between charged corpuscular beams.

Concerning the charged corpuscular beam exposure device for plotting the pattern on the object to be exposed with plural charged corpuscular beams, this device is provided with a basic dose data memory 1010 for storing reference dose data for controlling the irradiation of the object to be exposed with charged corpuscular beams; a first correction coefficient memory 1020 for storing plural kinds of proximate effect correction data for correcting the irradiation with these charged corpuscular beams for each of incident positions of charged corpuscular beams, on the object to be exposed in order to reduce an influence caused by a proximate effect; a second correction coefficient memory 1030 for storing calibration data for correcting the dispersion of dosage among plural charged corpuscular beams; and an exposure unit for exposing the pattern on the object to be exposed while controlling the irradiation with respective charged corpuscular beams, on the basis of the reference dose data, the proximate effect correction data and the calibration data stored in the memories 1010, 1020 and 1030.


Inventors:
MURAKI MASATO
YUI TAKASUMI
Application Number:
JP35348499A
Publication Date:
June 22, 2001
Filing Date:
December 13, 1999
Export Citation:
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Assignee:
CANON KK
International Classes:
H01J37/305; A61N5/00; G01T1/00; G03F7/20; G21K5/10; H01J37/302; H01J37/317; H01L21/027; (IPC1-7): H01L21/027; G03F7/20; H01J37/305
Attorney, Agent or Firm:
Yasunori Otsuka (1 person outside)