Title:
DEVICE FOR AND METHOD OF EXTRACTING ABNORMALITY OF FACILITY FLOW, AND STORAGE MEDIUM RECORDED WITH PROGRAM FOR EXTRACTING ABNORMALITY FROM FACILITY FLOW
Document Type and Number:
Japanese Patent JP2000198051
Kind Code:
A
Abstract:
To rapidly extract a factor which deteriorates the quality being caused by historical data of a manufacturing facility including a facility flow for a manufacturing device in a process step.
In an abnormality extracting device for a facility flow at a process step, an input device 1 inputs parameters necessary for extracting an abnormality of a facility flow, and a central processing unit 3 carries out a multistage multivariate analysis in accordance with quality result data and historical data of a manufacturing device so as to extract an abnormality of the facility flow. Further, the result of the extraction is outputted through an output device 5 such as a display unit or a printing device.
Inventors:
TANAKA MASAYUKI
OGAWA KATSUYUKI
SHIMODA RIICHI
OGAWA KATSUYUKI
SHIMODA RIICHI
Application Number:
JP37724398A
Publication Date:
July 18, 2000
Filing Date:
December 29, 1998
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B23Q41/08; B65G61/00; G05B15/02; G05B19/418; G05B23/02; G06Q50/00; G06Q50/04; H01L21/02; (IPC1-7): B23Q41/08; G05B15/02; G06F17/60; H01L21/02
Attorney, Agent or Firm:
Ryuji Higashijima
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