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Patent Searching and Data


Title:
DEVICE AND METHOD FOR FILM FORMATION, PRODUCTION METHOD FOR OPTICAL RECORDING MEDIUM, AND OPTICAL RECORDING MEDIUM
Document Type and Number:
Japanese Patent JP2003059130
Kind Code:
A
Abstract:

To provide a device and a method for film formation by which an abnormal discharging does not occur and a formed film is not destroyed when laminating a metal film and a dielectric film on an insulated substrate at least.

This device has first sputter chambers CH1 and CH3 each equipped with a target 91 for forming the metal film, an electrode 92 for holding the target 91 and a DC power source 65, second sputter chambers CH2, CH4 and CH5 each equipped with a target 91 for forming the dielectric film, an electrode 92 for holding the target 91 and an RF power source 60 for impressing a high frequency voltage to the electrode 92, a carrier 6 for holding a substrate 52 and a conveyer 3 for holding the carrier 6 while electrically floating it and for conveying the carrier 6 between the first and second sputter chambers, and the films are formed by grounding the carriers 6 positioned in the second sputter chambers CH2, CH4 and CH5.


Inventors:
ABIKO TORU
IKEDA ETSURO
FURUICHI NOBUAKI
Application Number:
JP2001250760A
Publication Date:
February 28, 2003
Filing Date:
August 21, 2001
Export Citation:
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Assignee:
SONY CORP
International Classes:
C23C14/34; G11B7/24; G11B7/24047; G11B7/2531; G11B7/2534; G11B7/26; (IPC1-7): G11B7/26; C23C14/34; G11B7/24
Attorney, Agent or Firm:
Takahisa Sato