To provide a lithium secondary battery electrode forming device capable of stably forming an electrode for a lithium secondary battery having excellent battery characteristics by evenly and stably forming an active material layer having a desirable film quality and a desirable film thickness.
This lithium secondary battery electrode forming method is provided with a process for measuring at least one of the active material layer film forming speed, composition of the active material layer and temperature of a collector 1 when forming the active material layer on the collector 1 by using a method of emitting the raw material into the gaseous phase for supply, and a process for forming the active material layer, controlling for feedback of the active material layer forming condition on the basis of a result of the measurement.
WO/2004/105095 | THIN-FILM DEPOSITION EVAPORATOR |
JP3938437 | THIN FILM FORMATION METHOD |
TARUI HISAKI