To provide a device and a method for manufacturing an inorganic compound thin film library manufacturing/evaluating efficiently a laminated thin film of high quality of an inorganic compound compounded with a large number of elements, in a short time, and allowing continuous and automatic execution ranging over from the manufacturing of the thin film library up to the evaluation of each thin film.
This device for manufacturing the inorganic compound thin film library by forming the plurality of laminated thin films of the inorganic compound with thin films layered with two or more of layers on a substrate, includes: a sample preparation means 14 for fractionating one kind or more of raw material solutions 5 to prepare a sample solution 6 by mixing those; a dispensing means 14 for dispensing the sample solution 6 to a plurality of portions on the substrate 3; an automatic dispenser 1 provided with an applying means 16 for applying the sample solution 6 onto the substrate 3; a sample block 2 for arranging the substrate 3; a burning means 8 for the thin film 4 on the substrate 3; and a control means 9 for controlling the preparation/dispensing/application of the sample solution 6 and the burning of the thin film on the substrate.
KONISHI YOSHIYA
SUGIHARA HIDEKI
ARAI TAKEO
| US6567751B1 | 2003-05-20 |