Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DEVICE AND METHOD FOR MEASURING SPECIFIC GRAVITUY OF ETCHANT, AND HYDRAULIC PRESSURE SENSOR FOR THE SAME DEVICE
Document Type and Number:
Japanese Patent JP2001083063
Kind Code:
A
Abstract:

To provide a specific gravity measuring device, capable of accurately measuring the specific gravity of an etchant in real time by measuring the hydraulic pressure of the etchant, which is circulated in a circulation channel.

A part of an etchant circulated in a circulation channel flows into the retention part of a detecting tube 24. The hydraulic pressure of the etchant is detected by hydraulic pressure sensors 10 and 11 at the retention part, to detect its specific gravity from the detected hydraulic pressure difference. Since the specific gravity is detected from the hydraulic pressure of the etchant which is circulated as mentioned above, its spcific gravity can be detected with accuracy in real time, without being affected by bubbles even if they are produced in the etchant.


Inventors:
AKASEGAWA KATSUO
Application Number:
JP26047299A
Publication Date:
March 30, 2001
Filing Date:
September 14, 1999
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NIPPON AQUA KK
International Classes:
G01L9/04; G01L9/00; G01L13/02; G01N9/26; (IPC1-7): G01N9/26; G01L13/02
Attorney, Agent or Firm:
Hisao Komori