Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DEVICE AND METHOD FOR MEASURING THERMAL PROPERTY
Document Type and Number:
Japanese Patent JP2002303597
Kind Code:
A
Abstract:

To provide a technique to improve measurement accuracy when thermal conductivity of a thin film is measured by alternating current heating.

An alternating current voltage is applied to a metallic thin film 43 on the surface of a sample 40 by an alternating power source 21 to heat the film, a spot-like laser beam is applied onto a measuring part on the surface of the film 43 by a laser irradiation means 12, the reflected light is detected by a light detection device 13, the detection result is analyzed by a measuring device 22, and the temperature at the measuring part of the film 43 is measured. Since the temperature is measured optically in such a manner, the alternating current voltage applied for heating does not interfere with the voltage for measurement as in the past, and thereby frequency of the applied alternating current voltage does not have an upper limit, differing from the past, and the alternating current voltage with a wide range of frequency can be applied for temperature measurement.


Inventors:
Kato, Ryozo
Hatta, Ichiro
Application Number:
JP2001000106655
Publication Date:
October 18, 2002
Filing Date:
April 05, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ULVAC-RIKO INC
UNIV NAGOYA
International Classes:
G01K11/00; G01N25/18; (IPC1-7): G01N25/18; G01K11/00
Domestic Patent References:
JP2001028385A
JP2000121585A
JP2000028558A
Attorney, Agent or Firm:
石島 茂男 (外1名)