Title:
DEVICE AND METHOD FOR PRECISE CUTTING
Document Type and Number:
Japanese Patent JP3493282
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the productivity of a device and method for precise cutting, by making the cutting stroke of the device remarkably shorter by arranging first and second spindles on a straight line, so that first and second blades may be faced to each other in cutting means.
SOLUTION: In a cutting area 19, first and second spindles 20 and 21 are arranged on a straight line in the Y-axis direction, and first and second blades 22 are respectively mounted on the front ends of the spindles 20 and 21. The first spindle 20 and the first blade 22 constitute a first cutting means 24, and the second spindle 21 and second blade 23 constitute a second cutting means 25. The spindles 20 and 21 are arranged on the straight line so that the blades 22 and 23 may be faced to each other. The spindles 20 and 21 can be moved independently in the Z-axis direction.
Inventors:
Souichi Ishiwata
Application Number:
JP17693597A
Publication Date:
February 03, 2004
Filing Date:
July 02, 1997
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; (IPC1-7): H01L21/301
Domestic Patent References:
| JP59156753U |
Attorney, Agent or Firm:
Isao Sasaki (1 person outside)
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