DEVICE AND METHOD FOR PRESSING PROBER

Japanese Patent JP3662756

B2

PROBLEM TO BE SOLVED: To improve the reliability of connection of a prober to the electrodes of a substrate to be inspected by pressing the prober against the electrode- formed part of the substrate to be inspected by a pressing means formed of a plurality of divided pressing heads.
SOLUTION: This device is a prober pressing device provided with a pressing means 30 to press a plane prober 6 against the electrode-formed part 4 of a substrate to be inspected 3, and the pressing means 30 is formed of a plurality of divided pressing heads 13. Each of the pressing heads 13 is provided with a pressing surface 32 in the vicinity of its one end to be pressed against a predetermined location of the plane-shaped prober 6. In the device 10, the pressing heads 13 are mounted in such a way as to be each independently rotated on a rotating shaft 14 so as to be capable of each independently pressing the plane-shaped prober 6. In addition, by rotating the pressing heads 13 by a cylinder 16, the pressing surface 32 are pressed against predetermined locations of the plane-shaped prober 6. Furthermore, by joining the vicinities of the intermediate parts of the pressing heads 13 to a machine base 11 by the rotating shaft 14 and applying force onto force points 36, the pressing surfaces 32 are pressed against the predetermined location of the plane prober 6.

Shigeru Kobayashi
Toshiyuki Eba
Takanori Tahara
Kenji Sato
Hiromitsu Wada

JP384699A

June 22, 2005

January 11, 1999

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INTERNATIONAL BUSINESS MASCHINES CORPORATION

G01R1/06; G01R31/28; H01L21/66; (IPC1-7): G01R31/28; G01R1/06

JP11097494A
JP10246735A
JP9036188A
JP8254677A
JP7244128A
JP7321166A

US4225819

Takayoshi Kusumoto
Shuko Takayama

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