Title:
DEVICE AND METHOD FOR PRODUCING GAS-DISSOLVED WATER AND WASHING DEVICE
Document Type and Number:
Japanese Patent JP3333149
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To shorten startup time and reduce gas consumption and solvents by a simple device configuration.
SOLUTION: This ozone water producing device 1 is provided with a gas dissolving module 3 which brings ozone gas into contact with pure water to generate ozone water, gas introducing piping 4 which feeds ozone gas from an ozone gas generator 2 to the gas dissolving module 3, a buffer 5 which is connected to the middle of the gas introducing piping 4 and discharges the ozone gas toward the gas introducing piping 4 after temporally storing the ozone gas, a first valve 6 which opens and closes the gas introducing piping 4 to switch the introduction and the stop of the gas supplied to the gas dissolving module 3, and a check valve 7 which prevents the backflow of the storage gas discharged from the buffer 5.
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Inventors:
Nobuaki Haga
Kenichi Mimori
Yasuhiko Kasama
Kenichi Mimori
Yasuhiko Kasama
Application Number:
JP19099899A
Publication Date:
October 07, 2002
Filing Date:
July 05, 1999
Export Citation:
Assignee:
Alps Electric Co., Ltd.
Organo Co., Ltd.
Organo Co., Ltd.
International Classes:
B08B3/08; B01F1/00; B01F3/04; B01F15/02; B08B3/02; H01L21/304; (IPC1-7): B01F1/00; B08B3/08; H01L21/304
Domestic Patent References:
| JP445596U |
Attorney, Agent or Firm:
Masatake Shiga
Masatake Shiga (8 outside)
Masatake Shiga (8 outside)