Title:
DEVICE AND METHOD FOR SEPARATING MATERIALS
Document Type and Number:
Japanese Patent JP2008135712
Kind Code:
A
Abstract:
To provide a device capable of separating single crystals by cutting inner hole with a small amount of coolant-lubricant.
A cutting disk 2 having a concentric hole for inner hole cutting is rotatable about its central axis in order to cut a single crystal 1 with its edge 3. The device includes a positioning device for positioning the single crystal 1 to be cut relative to the cutting disk 2, a first supply device 10 for the supply of the coolant-lubricant onto the cutting disk 2 having cut the single crystal 1, a device 12 for the supply of compressed air, and a second supply device 11 for the supply of washing liquid.
Inventors:
HAMMER RALF
GRUSZYNSKY RALF
KLEINWECHTER ANDRE
FLADE TILO
GRUSZYNSKY RALF
KLEINWECHTER ANDRE
FLADE TILO
Application Number:
JP2007260189A
Publication Date:
June 12, 2008
Filing Date:
October 03, 2007
Export Citation:
Assignee:
FREIBERGER COMPOUND MAT GMBH
International Classes:
B23D59/02; B28D5/02; B28D5/00; H01L21/304; B28D7/02; C30B33/00
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office