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Patent Searching and Data


Title:
DEVICE AND METHOD FOR SUPPLYING LIQUID PRECURSOR
Document Type and Number:
Japanese Patent JP2001153035
Kind Code:
A
Abstract:

To provide a method and a device for supplying liquid precursor to a semiconductor processing device.

This liquid precursor supplying device 10 includes a supply source 11, an inflow tube 12, a two-directional valve 13, a pump assembly 14, an outflow tube 15, a cut-off valve 16, and a rapid flow evaporator 17. The pump assembly 14 has an either form of an injector or a variable quality pump and is controlled by an assembly between a pulse motor 27 and a linear encoder 30. This arrangement structure is so set as to return unused liquid precursor to the supply source.


Inventors:
Macneil, John
Application Number:
JP2000000288304
Publication Date:
June 05, 2001
Filing Date:
September 22, 2000
Export Citation:
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Assignee:
TRIKON HOLDINGS LTD
International Classes:
F04B19/04; C23C16/40; C23C16/56; F17D1/14; H01L21/00; H01L21/205; H01L21/3105; H01L21/316; (IPC1-7): F04B19/04; F17D1/14; H01L21/205
Attorney, Agent or Firm:
石田 敬 (外4名)