DEVICE AND METHOD FOR TRANSFERRING THIN PLATE MEMBER

Title:

DEVICE AND METHOD FOR TRANSFERRING THIN PLATE MEMBER

Document Type and Number:

Japanese Patent JPH06219510

Kind Code:

A

Abstract:

PURPOSE: To reduce the installation space of a transferring device by arranging the carrier loading area in front of the device, arranging the member transferring area to the end side, and moving the carrier transferring table between the areas.

CONSTITUTION: A carrier loading area A to load a first carrier 24 or a second carrier 25 for a carrier loading table 13 and a member transferring area B to deliver thin plate members 26 between a chuck 14 and the respective carriers 24, 25 are provided on a transferring stage 12 provided on the device body 11. The carrier loading area A is arranged on the front side F, and the member loading area B is arranged to the end side of the carrier loading area A, i.e., along the end direction of the device body 11. In addition, the carrier loading table 13 is made movable between the carrier loading area A and the member moving area B, and the thin plate members 26 are transferred from the first carrier 24 to the second carrier 25.

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Inventors:

KOJIMA AKIRA
MAKINO HARUHIKO
SATOU TOMOHIRO

Application Number:

JP2727793A

Publication Date:

August 09, 1994

Filing Date:

January 22, 1993

Export Citation:

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Assignee:

SONY CORP
SEIWA ENG KK

International Classes:

B65G1/00; B65G47/90; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): B65G1/00; B65G47/90; B65G49/07; H01L21/68

Attorney, Agent or Firm:

Kuninori Funabashi

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