DEVICE PROVIDED FOR SAFETY OF ELECTROSTATIC SUSPENSION FURNACE

Title:

DEVICE PROVIDED FOR SAFETY OF ELECTROSTATIC SUSPENSION FURNACE

Document Type and Number:

Japanese Patent JP2002206864

Kind Code:

A

Abstract:

To provide an electrostatic suspension furnace in which a danger that an external force is exerted on the window of an electrode change unit during changing the electrode change unit to break and scatter the window is eliminated.

An outer protective cover device is provided which is attached to an electrode changing outlet/inlet upon changing the electrode change unit, and covers the window of the electrode change unit when the electrode change unit is taken out from the electrode changing outlet/inlet. A shutter or an inner protective cover device may be provided in place of the outer protective cover device.

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Inventors:

YUZAWA MARI
FUKUSHIMA KAZUHIKO
SHIMADA TADANORI
KOBAYASHI MOTOHIRO
NAKAMURA TOMIHISA
KARASAWA HIROKI
IKEDA TOSHITAMI

Application Number:

JP2000401969A

Publication Date:

July 26, 2002

Filing Date:

December 28, 2000

Export Citation:

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Assignee:

MITSUBISHI ELECTRIC CORP
NAT SPACE DEV AGENCY

International Classes:

F27B14/04; F27B14/06; F27B14/14; F27B14/18; F27B14/20; F27D3/00; F27D7/06; F27D11/10; F27D11/12; F27D19/00; F27D21/00; (IPC1-7): F27B14/04; F27B14/06; F27B14/14; F27B14/18; F27B14/20; F27D3/00; F27D7/06; F27D11/10; F27D11/12; F27D19/00; F27D21/00

Attorney, Agent or Firm:

Soga Doteru (6 people outside)

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