To prevent the occurrence of particles which are not stirred when a powdery granular substance is stirred.
A device 3 for stirring the particles comprises: a vacuum tank 2; a vessel 73 which is placed in an vapor deposition apparatus 1 having a vapor deposition source 5 and accommodates the powdery granular substance 7 therein; a scraper 75 for stirring the particles of the powdery granular substance 7; and a drive mechanism 72 for relatively driving the scraper 75 with respect to the vessel 73. At least the inner wall of the vessel 73 is coated with the same type of a material as the powdery granular substance 7, and at least a part contacting with the inner wall of the vessel 73 of the scraper 75 is coated with the same type of a material as a vapor deposition material 11 evaporated in the vapor deposition source 5 or the same type of a material as the powdery granular substance 7. Chips produced by the abrasion between the coating on the vessel 73 and the coating of the scraper 75 do not become an impurity, because they are the same type of the material as the powdery granular substance 7 or the vapor deposition material 11.
YAMAGUCHI KOICHI
MATSUURA MASAMICHI
ITO HISAMI
| JP2000109969A | 2000-04-18 | |||
| JP2002110175A | 2002-04-12 | |||
| JPH05132755A | 1993-05-28 | |||
| JPH01147065A | 1989-06-08 | |||
| JP2005281765A | 2005-10-13 | |||
| JPH08325723A | 1996-12-10 |
Ori Akira
Yasuo Iisaka
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