Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DEVICE FOR TRANSFERRING STRUCTURE PROVIDED IN MASK ONTO SUBSTRATE
Document Type and Number:
Japanese Patent JP2013219381
Kind Code:
A
Abstract:

To provide a device 1 for transferring a structure provided in a mask 2 onto a substrate 3.

A device comprises: at least one illumination device 9 for uniformly irradiating a part of a mask 2; a mask holding device 7 for holding the mask 2 in a mask plane 8 defined by an X axis and a Y axis perpendicular to the X axis; at least one lens device 6 arranged above the mask plane 8 on a side opposite to the illumination device 9 in order to map a structure onto a substrate 3; a substrate holding device 4 arranged at a distance spaced apart from the lens device 6 so that the substrate 3 may be held in a substrate plane 5 parallel to the mask plane 8; and means for synchronously moving the illumination device 9 and the lens device 6 in parallel, relatively to the mask plane 8 and the substrate plane 5 along the X axis and/or the Y axis.


Inventors:
THALLNER ERICH
Application Number:
JP2013119578A
Publication Date:
October 24, 2013
Filing Date:
June 06, 2013
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
THALLNER ERICH
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
JP2006261361A2006-09-28
JP2001274083A2001-10-05
JP2003043696A2003-02-13
JP2000114145A2000-04-21
JP2003035822A2003-02-07
JPH07183190A1995-07-21
JP2005250130A2005-09-15
JPS63131515A1988-06-03
JP2006337999A2006-12-14
JP2007026517A2007-02-01
JPH10288842A1998-10-27
JP2003156852A2003-05-30
JPH0430411A1992-02-03
Foreign References:
WO2006128613A12006-12-07
WO2006064363A12006-06-22
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro



 
Previous Patent: FILM FORMING METHOD, AND FILM FORMING APPARATUS

Next Patent: IMAGE SENSOR WITH IMPROVED COLOR CROSSTALK