DEVICE FOR TRAPPING GASEOUS COMPOUND OF REFRACTORY METAL AND PUMPING PLANT INCLUDING THE SAME

Title:

DEVICE FOR TRAPPING GASEOUS COMPOUND OF REFRACTORY METAL AND PUMPING PLANT INCLUDING THE SAME

Document Type and Number:

Japanese Patent JPH01304029

Kind Code:

A

Abstract:

PURPOSE: To separate harmful gaseous compds. of refractory metals by pyrolyzing and trapping these gaseous compds. within a hollow cylindrical member.

CONSTITUTION: A perpendicularly disposed cylindrical enclosure 1 consists of the hollow cylindrical member 3 which has an annular cover 4 and a hollow bottom 5. An electric resistor 6 is disposed in an auxiliary body 3 and an electric resistor 7 is wound around the member 2 to heat the enclosure 1. A copper sheet is wound within the enclosure 1 to constitute a thermally conductive lining 10 in the annular space. The lower side of the lining is provided with a gas inlet 8 and the upper side of the lining is provided with a gas outlet opening 11. As a result, the hazardous gases, such as fluorine compds., discharged from electronic parts industry are pyrolyzed and trapped.

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Inventors:

SUMIYA TORU
MATSUURA MASAMICHI
HIRASE IKUO
DOUNI RUFUAN

Application Number:

JP29969088A

Publication Date:

December 07, 1989

Filing Date:

November 29, 1988

Export Citation:

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Assignee:

AIR LIQUIDE

International Classes:

B01D53/34; B01D53/68; C22B7/00; C22B34/36; B01D53/64; (IPC1-7): B01D53/34; C22B7/00; C22B34/36

Attorney, Agent or Firm:

Takehiko Suzue (2 outside)

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