To provide a small-sized, high productivity and high speed driven piezoelectric/electrostrictive device suitably used for control of a light quantity, etc., of a mechanical optical switch, an optical shutter, etc.
The structure of the piezoelectric/electrostrictive device 51 is constituted so that a connection plate 2 is joined to a substrate 5, and a diaphragm 3 arranged with a piezoelectric element 4 is bridged or fitted between the connection plate 2 and the substrate 5 in the direction vertical to the joint direction between the connection plate and the substrate 5. Since the piezoelectric/electrostrictive device 51 uses structurally displacement (vibration) in the intrasurface direction of a shield plate in a solid mode, it has an excellent effect that it can be miniaturized, high speed driven, and driven with low power consumption. Further, since respective parts are constituted by integrating with calcination of ceramic, the device is excellent in long term reliability.
ONISHI KOSEI
KIMURA KOJI
