Title:
熱質量流量センサの熱隔離のための装置及び方法
Document Type and Number:
Japanese Patent JP2005514612
Kind Code:
A
Abstract:
A thermal mass flow controller includes a sensor assembly and mass flow controller housing. A thermal ground limits the conductive thermal path between the mass flow controller housing and the sensor assembly and, due to the limited cross-section of the thermal ground, substantially eliminates externally imposed thermal gradients within the sensor assembly.
Inventors:
Ambrosina, Jessie
Suzuki Isao
Suzuki Isao
Application Number:
JP2003558442A
Publication Date:
May 19, 2005
Filing Date:
November 20, 2002
Export Citation:
Assignee:
MKS Instruments, Incorporated
International Classes:
G01F1/684; G01F5/00; G05D7/06; G01F1/00; (IPC1-7): G01F1/684; G01F1/00
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui