Title:
DIAMINO COMPOUND AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2003300948
Kind Code:
A
Abstract:
To provide a new compound usable as a proton neutralizing agent having proper reactivity, effectively preventing dark reaction by reacting with a proton in a comparatively mild condition such as storing a resist material and inhibiting no reaction of the protein with a photoresist polymer in light exposure.
The diamino compound usable as the protein neutralizing agent is represented by formula (I). Wherein, n is an integer of 1-3 and X is H or the like.
Inventors:
KUZUHA NOBORU
Application Number:
JP2002102492A
Publication Date:
October 21, 2003
Filing Date:
April 04, 2002
Export Citation:
Assignee:
EIWEISS KK
International Classes:
C07C271/20; C07C269/06; (IPC1-7): C07C271/20; C07C269/06
Attorney, Agent or Firm:
Shunichiro Suzuki (3 others)
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