Title:
ダイヤモンド複合材及びその製造方法
Document Type and Number:
Japanese Patent JP7362166
Kind Code:
B2
Abstract:
This diamond composite (100) includes a first base substrate (10) which has an oxide layer (10a) of element M and contains the element M in the composition and a second base substrate (20) which is bonded to the oxide layer (10a) and is composed of diamond, in which the M is one or more selected from a metal element (where alkali metals and alkaline earth metals are excluded) with which an oxide can be formed, Si, Ge, As, Se, Sb, Te, and Bi, and the second base substrate (20) is bonded to the oxide layer (10a) of the first base substrate (10) by M-O-C bonding of at least some C atoms on the (100) surface of the diamond constituting the second base substrate (20).
Inventors:
Takashi Matsumae
Hitoshi Umezawa
Yuichi Kurashima
Hideki Takagi
Hitoshi Umezawa
Yuichi Kurashima
Hideki Takagi
Application Number:
JP2022526641A
Publication Date:
October 17, 2023
Filing Date:
May 27, 2021
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
H01L23/373; B23K20/00; H05K7/20
Domestic Patent References:
| JP2018157076A | ||||
| JP2013075356A | ||||
| JP2006228963A |
Foreign References:
| US20130336873 |
Other References:
宮崎 久生 ほか,ダイヤモンド-Al2O3界面のバンドアライメント分析,2018年 第79回 応用物理学会秋季学術講演会[講演予稿集] Extended Abstracts of The 79th JSAP,日本,公益社団法人応用物理学会,2018年09月05日,p.05-316,ISBN: 978-4-86348-679-9, 講演番号:21p-232-6
宮田 大輔 ほか,原子的平坦OH終端ダイヤモンド(111)表面の形成 Formation of atomically flat OH-terminated,2014年 第61回 応用物理学会春季学術講演会 [講演予稿集] Extended Abstracts of The 61st JSA,日本,公益社団法人応用物理学会,2014年03月03日,p.06-075,ISBN: 978-4-86348-679-9, 講演番号:18p-D6-1
宮田 大輔 ほか,原子的平坦OH終端ダイヤモンド(111)表面の形成 Formation of atomically flat OH-terminated,2014年 第61回 応用物理学会春季学術講演会 [講演予稿集] Extended Abstracts of The 61st JSA,日本,公益社団法人応用物理学会,2014年03月03日,p.06-075,ISBN: 978-4-86348-679-9, 講演番号:18p-D6-1
Attorney, Agent or Firm:
Kazuzumi Nishizawa
Makiko Otsuki
Onami Kazunori
Makiko Otsuki
Onami Kazunori