To provide a diamond electron source which is used for an electron beam, electron beam equipment, and a vacuum tube especially used for an electron microscope and an electron beam exposure equipment in which diamond is used, and which has high brightness and narrow energy width.
This electron source is the diamond electron source and uses a columnar single crystal diamond, and constituted of an electron emitting part 11 and an energization heating part 12. The electron emitting part includes a sharp-pointed protrusion of height of 10 m or more and a tip curvature radius of 5 m or less only at one place at the end face of a column. Impurities most contained in the single crystal diamond of the electron discharge part are nitrogen of which the concentration is 11017 cm-3 or more, and in which resistance between room temperature (25C) terminals of the energization heating part is 500 or less.
AKAHA YOSHIHIRO
NISHIBAYASHI YOSHIKI
IMAI TAKAHIRO
| JP2004119018A | 2004-04-15 | |||
| JP2004119019A | 2004-04-15 | |||
| JPH0794077A | 1995-04-07 | |||
| JP2005044634A | 2005-02-17 | |||
| JPH07272618A | 1995-10-20 |
| WO2006135092A1 | 2006-12-21 | |||
| WO2006135093A1 | 2006-12-21 |
Norio Kagami
Jun Komatsu