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Title:
DIAMOND ELEMENT
Document Type and Number:
Japanese Patent JPH0687682
Kind Code:
A
Abstract:

PURPOSE: To provide a diamond element capable of preventing the oxidation of the joined metal layer and having stable characteristics.

CONSTITUTION: A metal layer 3 of yttrium, scandium, lanthanum, magnesium, hafnium or an alloy of them having about 3-4eV work function is joined to a diamond layer 2 on a substrate 1 by Schottky joining.


Inventors:
KATSUMATA SATOSHI
AKETAGAWA MASATOSHI
Application Number:
JP26288692A
Publication Date:
March 29, 1994
Filing Date:
September 04, 1992
Export Citation:
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Assignee:
IDEMITSU PETROCHEMICAL CO
International Classes:
C04B41/88; C04B41/51; C23C14/18; H01L21/20; (IPC1-7): C04B41/88; C23C14/18; H01L21/20
Attorney, Agent or Firm:
Kihei Watanabe