Title:
DIAMOND SURFACE ACOUSTIC WAVE ELEMENT
Document Type and Number:
Japanese Patent JP3132074
Kind Code:
B2
Abstract:
PURPOSE: To realize the surface acoustic wave element stable against a temperature change.
CONSTITUTION: The surface acoustic wave element comprising a piezoelectric layer 4, an electrode layer, a diamond layer 2 or a diamond-like carbon film layer is formed on a heat sink 6. The heat sink 6 is made of a polycrystal or a single crystal diamond. Part or all of the diamond layer 2 or the diamond- like carbon film layer is formed to be an insulation layer. Thus, the surface acoustic wave element stable against a temperature change and operated at a high frequency range from several hundreds of MHz to several GHz with a small insertion loss is realized with excellent reproducibility. The surface acoustic wave element is suitable for a band pass filter, a resonator, an oscillator and a convolver and a delay line or the like used for a high frequency band.
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Inventors:
Akihiro Hachigo
Hideaki Nakahata
Takahiro Imai
Naoji Fujimori
Hideaki Nakahata
Takahiro Imai
Naoji Fujimori
Application Number:
JP22891291A
Publication Date:
February 05, 2001
Filing Date:
September 09, 1991
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H03H3/08; H03H9/25; (IPC1-7): H03H9/25; H03H3/08
Domestic Patent References:
JP2239715A |
Other References:
【文献】1989 IEEE ULTRASONICS SYMPOSIUM,VOL.1,p.351~354
Attorney, Agent or Firm:
Tetsuji Ueshiro (1 person outside)