To prepare a DLC film high in adhesion with a base material because of the reason that, as to a DLC film formed by a plasma CVD method using hydrocarbon as the raw material, it is good in frictional characteristics, but, particularly, as for a substrate such as a stainless material, a thick DLC film can not directly formed, and an intermediate layer shall be formed on a space between the base material and the DLC thin film, and, in the case the adhesion between the intermediate layer and the DLC film formed thereon is insufficient, the formed film swiftly peels.
In a diamondlike carbon thin film contg. a diamondlike carbon layer formed via an intermediate layer on a base material, a space between the intermediate layer and the diamondlike carbon layer is provided with a mixed componential layer composed of the components of the intermediate layer and carbon. At the position in which the mixed componential layer is in contact with the diamondlike carbon layer, the mixed componential layer is substantially composed of carbon, furthermore, at the position in which it is in contact with the intermediate layer, the mixed componential layer is substantially composed of the components of the intermediate layer, and, moreover, the compsn. of the mixed componential layer is stepwise or continuously changed in the layer thickness direction.
KADOYA SATOSHI
MORONUKI MASAKI
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