Title:
DIAPHRAGM COMPRESSOR, COOLING UNIT, PROJECTOR, RECORDING DEVICE AND THREE-DIMENSIONAL STRUCTURE MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2020159227
Kind Code:
A
Abstract:
To provide a diaphragm compressor capable of effectively compressing fluid.SOLUTION: A diaphragm compressor 1 comprises: a diaphragm 3; and a substrate 4 that is connected to the diaphragm 3 and sandwiches the fluid which is compressed by pressing the diaphragm 3 in a pressing direction P, together with the diaphragm 3. In the diaphragm 3 of a region R where the fluid is compressed by the diaphragm 3 and the substrate 4 in a plan view, an annular groove 3b having a thin thickness is provided in the pressing direction P. With the diaphragm compressor 1 having such a configuration, it is possible to compress fluid effectively.SELECTED DRAWING: Figure 6
Inventors:
ONISHI YASUNORI
HANAMURA YUKI
FUNASAKA TSUKASA
HANAMURA YUKI
FUNASAKA TSUKASA
Application Number:
JP2019056780A
Publication Date:
October 01, 2020
Filing Date:
March 25, 2019
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
F04B45/04; B41J2/01; B81B3/00; F04B43/02; G03B21/16; H05K7/20
Attorney, Agent or Firm:
Hiroki Ishii