Title:
ダイアフラム作動微小電気機械スイッチ
Document Type and Number:
Japanese Patent JP4045274
Kind Code:
B2
Abstract:
A micro-electromechanical (MEM) RF switch provided with a deflectable membrane ( 60 ) activates a switch contact or plunger ( 40 ). The membrane incorporates interdigitated metal electrodes ( 70 ) which cause a stress gradient in the membrane when activated by way of a DC electric field. The stress gradient results in a predictable bending or displacement of the membrane ( 60 ), and is used to mechanically displace the switch contact ( 30 ). An RF gap area ( 25 ) located within the cavity ( 250 ) is totally segregated from the gaps ( 71 ) between the interdigitated metal electrodes ( 70 ). The membrane is electrostatically displaced in two opposing directions, thereby aiding to activate and deactivate the switch. The micro-electromechanical switch includes: a cavity ( 250 ); at least one conductive path ( 20 ) integral to a first surface bordering the cavity; a flexible membrane ( 60 ) parallel to the first surface bordering the cavity ( 250 ), the flexible membrane ( 60 ) having a plurality of actuating electrodes ( 70 ); and a plunger ( 40 ) attached to the flexible membrane ( 60 ) in a direction away from the actuating electrodes ( 70 ), the plunger ( 40 ) having a conductive surface that makes electric contact with the conductive paths, opening and closing the switch.
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Inventors:
Llanes, Christopher, Bee
Land, Jennifer, El
Saenger, Catherine, Elle
Borant, Richard, Pea
Land, Jennifer, El
Saenger, Catherine, Elle
Borant, Richard, Pea
Application Number:
JP2004530750A
Publication Date:
February 13, 2008
Filing Date:
August 26, 2002
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
B81B3/00; H01H59/00; B81C1/00; G02B5/00; G02B26/00; G02B26/08; H01H57/00
Domestic Patent References:
| JP11176307A | ||||
| JP2000000968A | ||||
| JP9082199A | ||||
| JP2002237245A | ||||
| JP2002166556A | ||||
| JP2000015805A |
Foreign References:
| WO2001035433A1 | ||||
| WO2002059977A1 |
Attorney, Agent or Firm:
Hiroshi Sakaguchi
Yoshihiro City
Takeshi Ueno
Yoshihiro City
Takeshi Ueno