Title:
ダイヤフラムおよび圧力センサ
Document Type and Number:
Japanese Patent JP7440281
Kind Code:
B2
Abstract:
To provide a diaphragm and a pressure sensor that can be made thin.SOLUTION: The diaphragm is a diaphragm for a pressure sensor that is arranged so as to cover an opening opened in a frame portion, has a peripheral edge portion fixed to an opening edge portion, and is displaced by a difference between pressures applied to both sides. The diaphragm comprises a corrugated portion formed in a stretchable waveform arranged in a middle portion between the peripheral edge portion and a central portion of the diaphragm. A first corrugated portion located corresponding to a first opening edge located on one side of a center line passing through a center portion of the opening and a second corrugated portion located corresponding to a second opening edge located on the other side of the center line are arranged to be asymmetrical with respect to a line passing through the center portion of the opening and orthogonal to the centerline.SELECTED DRAWING: Figure 1
Inventors:
Manabu Ichikura
Soichiro Oshima
Soichiro Oshima
Application Number:
JP2020014876A
Publication Date:
February 28, 2024
Filing Date:
January 31, 2020
Export Citation:
Assignee:
Tokyo Cosmos Electric Co., Ltd.
International Classes:
G01L7/08
Domestic Patent References:
| JP2002062208A | ||||
| JP2078924A | ||||
| JP2009198337A |
Foreign References:
| US20120198939 |
Attorney, Agent or Firm:
Patent Attorney Corporation Washida International Patent Office