Title:
ダイアフラムポンプ
Document Type and Number:
Japanese Patent JP5052995
Kind Code:
B2
Abstract:
A diaphragm pump is provided to make a pump structure compact while preventing the leakage of gas due to the failure of a diaphragm. A diaphragm pump has a pump case(45) mounted between a motor case(33) and a pump head(44) for receiving a connecting rod(41) so as to prevent the increase of the pump size. The pump case and the motor case are in a sealed structure and the inside of the pump case is communicated with that of the motor case, so that gas leaked from a pump chamber(46) into the pump case due to the fatigue generated from a diaphragm(42) is prevented from being emitted to the outside of the pump.
Inventors:
Junichi Aikawa
Taisuke Osaka
Taisuke Osaka
Application Number:
JP2007214550A
Publication Date:
October 17, 2012
Filing Date:
August 21, 2007
Export Citation:
Assignee:
ULVAC Kiko Co., Ltd.
International Classes:
F04B45/04
Domestic Patent References:
| JP61004879A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Yasuo Iisaka
Ori Akira
Yasuo Iisaka