Title:
DIAPHRAGM TYPE VACUUM GAUGE
Document Type and Number:
Japanese Patent JPS62182636
Kind Code:
A
Abstract:
PURPOSE: To extremely reduce a measuring error due to the change in the temp. of a diaphragm type vacuum gauge, by covering a gauge frame body with a shield frame body through a vacuum space.
CONSTITUTION: A gauge frame body 1 is covered with a shield frame body 12 through a vacuum space 11. Because of this, even if the circumferential temp. changes, the vacuum space 11 functions as a heat insulating layer and, therefore, the change in he circumferential temp. is not almost exerted on the gauge frame body 1. As a result, a diaphragm 5 performs bending deformation corresponding only to the pressure change of a vacuum chamber 3 and, by this deformation, the vacuum degree of the vacuum chamber 3 can be measured accurately and inexpensively.
Inventors:
WATANABE WAKAO
Application Number:
JP2448186A
Publication Date:
August 11, 1987
Filing Date:
February 06, 1986
Export Citation:
Assignee:
ANELVA CORP
International Classes:
G01L21/00; (IPC1-7): G01L21/00
Domestic Patent References:
JP58089839B | ||||
JPS5827748B2 | 1983-06-11 |
Attorney, Agent or Firm:
Hachiman Yoshihiro