To provide a small-sized vacuum pressure sensor, which can measure a pressure range of 0.01 to 133 Pa with high sensitivity by improving the linearity of the relation between pressure and electrostatic capacity.
The size and thickness of a diaphragm 2 formed on a conductive silicon substrate 1 and the interval between the diaphragm and a fixed electrode are limited. A 1st glass (case) 4 and a 2nd (pedestal) glass 6 are jointed with both the surfaces of the diaphragm 2 and silicon substrate, and the surface of the 1st glass 4 jointed with the conductive silicon substrate is formed into a recessed shape; and the internal surface of the recessed surface of the case 4 is so adjusted that the diaphragm and fixed electrode face each other at a prescribed interval and a hole, which links the diaphragm with the outside, is bored in the pedestal glass 6.
ONUMA KEISOKU
MUKAI NOBUYUKI
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