Title:
DIAPHRAGM VACUUM PUMP
Document Type and Number:
Japanese Patent JP2015014285
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a diaphragm vacuum pump capable of overcoming defects of a conventional technology, and completely and surely preventing, in particular, formation of condensate at any time, so that pump characteristic of the vacuum pump is not deteriorated.SOLUTION: A diaphragm vacuum pump includes at least one diaphragm pump stage, at least one inlet valve disposed on the diaphragm pump stage for a process gas to be transferred, and at least one gas ballast valve for supplying a ballast gas. A flow channel for the ballast gas passing through the gas ballast valve is connected to a flow channel for the process gas at the back of the inlet valve in the flowing direction of the process gas.
Inventors:
BURGGRAF THORSTEN
JUERGEN WISSNER
JUERGEN WISSNER
Application Number:
JP2014127871A
Publication Date:
January 22, 2015
Filing Date:
June 23, 2014
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04B45/04
Domestic Patent References:
| JPH0915082A | 1997-01-17 | |||
| JPH08109905A | 1996-04-30 | |||
| JPH08109905A | 1996-04-30 | |||
| JP2002115676A | 2002-04-19 | |||
| JP2007107798A | 2007-04-26 | |||
| JPH0315678A | 1991-01-24 | |||
| JP2013108670A | 2013-06-06 | |||
| JP2013066792A | 2013-04-18 |
Foreign References:
| US6595758B1 | 2003-07-22 |
Attorney, Agent or Firm:
Mitsufumi Ezaki
Minoru Kajisawa
Junji Shinohara
Kiyota 栄章
Minoru Kajisawa
Junji Shinohara
Kiyota 栄章
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