To provide a diaphragm valve that can solve a problem of a disc-shaped diaphragm, that is, a problem that a deformation amount is large and dust is liable to be generated, a problem that a change of a capacity of a fluid passage associated with opening/closing is large, and a problem that a pressure-receiving area of a diaphragm at the closing of the passage is large.
A diaphragm 5 comprises: a cylindrical part 21 formed of a synthetic resin and fit to a valve rod 4; a bottom wall 22 closing a lower end opening of the cylindrical part 21; and a flange 23 arranged at the upper end of the cylindrical part 21; and a salient 24 formed in the center of the bottom wall 22 and faces an upper end opening of a fluid flow-in passage 2a. In an axial center portion 33 of the cylindrical part 21, a vertical cross section shape is formed into a substantially-circular shape which is protrusive to the outside of a radial direction.
ABE MAKOTO
UEDA KUNIO
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Akira Watanabe
Matsumura Naoto