To make it possible to hold two kinds of corrosion resistances with one kind of diaphragm by arranging a hydrogen permeation preventing film in an intermediate layer, and connecting stainless to one face of the preventing film and a nickel-based alloy to the other face to form a diaphragm.
The diaphragm is composed of three layers of stainless 2, a hydrogen permeation preventing film 3, and a nickel-based alloy 4, and the hydrogen permeation preventing film 3 is interposed between the stainless 2 and nickel-based alloy 4 in a sandwich state by a method of rolling, etc. As the stainless 2, SUS316L, etc., is used, and as the hydrogen permeation preventing film 3, aluminum, copper, plantinum, gold, etc., are used, and as the nickel-based alloy 4, a material of Hastelloy is used. For example, when a measurement fluid requires corrosion of the nickel-based alloy 4, it is used by connecting with a flange 5, so that the nickel base system alloy 4 is on a side of coming into contact with the measurement fluid and the stainless 4 is on a side of coming in contact with the flange 5 (on a sealed liquid 6 side).
YAMAMOTO YOSHIMI
TAJIRI YOJI
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