Title:
DICING APPARATUS
Document Type and Number:
Japanese Patent JP2753814
Kind Code:
B2
Abstract:
PURPOSE: To provide a dicing apparatus which can improve productivity.
CONSTITUTION: When a setup segment 86 is moved upward and downward with an air cylinder 94, the lower end thereof takes the lower and upper positions for a blade 58. When a spindle motor 60 moves downward and the setup segment 86 is placed in contact with the upper surface of a chuck table, the setup segment 86 moves and movement thereof is measured with a measuring instrument 102. On the basis of the measured value of this measuring instrument 102, the upper surface position of the chck table for the setup segment 86 can be obtained.
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Inventors:
MOROOKA MASAYA
Application Number:
JP8884495A
Publication Date:
May 20, 1998
Filing Date:
March 20, 1995
Export Citation:
Assignee:
SEIKOO SEIKI KK
International Classes:
B23D59/00; B28D5/00; B28D5/02; H01L21/301; (IPC1-7): H01L21/301; B28D5/02
Attorney, Agent or Firm:
Keinosuke Hayashi