Title:
DICING DEVICE AND DICING METHOD BY DICING DEVICE
Document Type and Number:
Japanese Patent JP2016186958
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a dicing device capable of detecting the abrasion loss of a blade accurately, and to provide a dicing method by the dicing device.SOLUTION: A invariable first distance a in the Z direction between the axis of rotation of a blade 28 and the tip 56A of a master member 56 is acquired. A second distance b in the Z direction between the axis of rotation of a blade 28 and the tip at the outer peripheral end of the blade 28 is acquired. A varying third distance c in the Z direction between the axis of rotation of a blade 28 and the tip 56A of a master member 56 is acquired. An abrasion loss operation unit 74 corrects the second distance b based on the variation of the third distance c for a reference value, i.e., the first distance a, thereby removing the error component caused by temperature change. The abrasion loss operation unit 74 subtracts the corrected second distance b from the known value of initial radius of the blade.SELECTED DRAWING: Figure 4
Inventors:
KINJO YUSUKE
Application Number:
JP2015065704A
Publication Date:
October 27, 2016
Filing Date:
March 27, 2015
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
H01L21/301; B24B27/06; B24B49/12
Attorney, Agent or Firm:
Kenzo Matsuura