Title:
DICING DEVICE AND DICING METHOD
Document Type and Number:
Japanese Patent JP2018129372
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a dicing device of novel configuration capable of inspecting the whole after dicing a workpiece.SOLUTION: A dicing device for dicing a workpiece includes first and second holding tables each holding a workpiece, dicing means for dicing the workpieces held by the first and second holding tables, inspection means including a line sensor for detecting the dicing results of the whole diced workpieces by imaging the diced workpiece held by the other of the first and second holding tables, while dicing the workpiece held by the one of the first and second holding tables by the dicing means, and control means including a storage section for storing the dicing results of each workpiece detected by the detection means.SELECTED DRAWING: Figure 1
Inventors:
SHIMADA MOTOHIKO
MORIKAZU YOJI
MORIKAZU YOJI
Application Number:
JP2017020595A
Publication Date:
August 16, 2018
Filing Date:
February 07, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B24B27/06; B24B49/12
Domestic Patent References:
| JP2008112884A | 2008-05-15 | |||
| JP2009147259A | 2009-07-02 | |||
| JP2008288423A | 2008-11-27 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro