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Title:
DICING DEVICE
Document Type and Number:
Japanese Patent JPH02214612
Kind Code:
A
Abstract:

PURPOSE: To prevent the adhesion of cut chips onto the surface of an object to be cut such as an Si substrate, and to obtain the washing effect of uniform high cleanliness by installing pure-water injection mechanisms on both sides of the blade house of a cutting section.

CONSTITUTION: Pure-water injection mechanisms (pure water showers) 3, 4 are mounted on both sides of the blade houses 1, 2 of a cutting section and pure water 7, 8 is injected from both sides of the mechanisms, thus preventing the adhesion of cut chips at the position, etc., of bonding of a object 9 to be cut such as an Si substrate. Accordingly, the generation of wire opening in wire bonding can be inhibited.


Inventors:
IKEGAMI TOSHIO
Application Number:
JP3486089A
Publication Date:
August 27, 1990
Filing Date:
February 14, 1989
Export Citation:
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Assignee:
KYUSHU NIPPON ELECTRIC
International Classes:
B28D7/02; B23D59/02; H01L21/301; (IPC1-7): B28D5/00; B28D7/02; H01L21/78
Attorney, Agent or Firm:
Sugano Naka



 
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