Title:
DICING DEVICE
Document Type and Number:
Japanese Patent JPS63209806
Kind Code:
A
Inventors:
YAGISAWA TORU
Application Number:
JP4268787A
Publication Date:
August 31, 1988
Filing Date:
February 27, 1987
Export Citation:
Assignee:
HITACHI LTD
HITACHI HOKKAI SEMICONDUCTOR
HITACHI HOKKAI SEMICONDUCTOR
International Classes:
H01L21/301; B28B5/00; B28B7/02; H01L21/78; (IPC1-7): B28B5/00; B28B7/02; H01L21/78
Attorney, Agent or Firm:
Katsuo Ogawa
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